Electronics Specialty Gases | Linde Thailand - Global Supplier of Over 100 Gases and Mixtures

Over 100 Gases and Mixtures - From Global Supplier of Choice

Operating a global network of production plants strategically located in core manufacturing hubs to bring you the full range of specialty gases supporting electronics manufacturing processes


Supplier of Choice

Offering over 100 specialty gases and mixtures, we are the first and global choice for electronics specialty gases. Our extensive process knowledge means that our electronics gases exceed your most stringent purity and consistency demands.

Our network of electronics specialty gas production plants worldwide is strategically focused in key manufacturing markets. This gives you the benefit of timely deliveries coupled with flexibility and security of supply.

Electronics specialty gases are shipped in a variety of container sizes to fit your individual application needs. These include cylinders, ton tanks, tube trailers and ISO containers.

Over 100 Gases and Mixtures - From Global Supplier of Choice
Special Gases for Deposition
Ammonia (NH₃)Nitrous oxide (N₂O)
Dichlorosilane (SiHâ‚‚Clâ‚‚)Oxygen (Oâ‚‚)
Disilane (Si₂H₆)Silane (SiH₄)
Hexachlorodisilane (Si₂Cl₆)Trichlorosilane (SiHCl₃)
Monomethylsilane (MMS)Trimethylsilane (3MS)
Nitric oxide (NO)Tungsten hexafluoride (WF₆)
This list is not exhaustive. Availability and specifications may vary by location. Please contact your local Linde representative for more information.

Specialty Gases for Etching
Boron trichloride (BCl₃)Hydrogen fluoride (HF)
Carbon dioxide (CO₂)Methyl fluoride (CH₃F)
Carbon monoxide (CO)Nitrogen trifluoride (NF₃)
Chlorine (Cl₂)Octofluorocyclobutane (C₄F₈)
Chlorine trifluoride (ClF₃)Octofluorocyclopentene (C₅F₈)
Difluoromethane (CH₂F₂)Octofluoropropane (C₃F₈)
Fluorine (F₂) – on-site generation also possible Silicon tetrafluoride (SiF₄)
Fluorine nitrogen mixture (20% F₂/N₂)Sulfur hexafluoride (SF₆)
Hexafluoro-1,3-butadiene (C₄F₆)Tetrafluoromethane (CF₄)
Hexafluoroethane (C₂F₆)Trifluoromethane (CHF₃)
Hydrogen bromide (HBr)Xenon difluoride (XeFâ‚‚)
Hydrogen chloride (HCl)
This list is not exhaustive. Availability and specifications may vary by location. Please contact your local Linde representative for more information.

Specialty Gases for Doping
Arsine (AsH₃)
Boron-11 trifluoride (¹¹BF₃)
Diborane (B₂H₆)
Diborane (¹¹B₂H₆)
This list is not exhaustive. Availability and specifications may vary by location. Please contact your local Linde representative for more information.

Others
Argon (Ar)
Helium (He)
Hydrogen (H₂) – on-site generation also possible
This list is not exhaustive. Availability and specifications may vary by location. Please contact your local Linde representative for more information.

Our network of electronics specialty gas production plants worldwide is strategically focused in key manufacturing markets.